QUANTAX EDS

The Bruker VZ-Adapter – Maximum efficiency and flexibility in EDS signal collection

XFlash with VZ-Adapter

The unique VZ (variable Z)-Adapter is available as an accessory to all XFlash® detectors. This unique tool allows the user to tilt the detector in vertical direction (Z). This can be done in-situ, meaning under vacuum and normal SEM operation. This provides unprecedented flexibility in analysis. The VZ-Adapter can be used to

  • provide optimum X-ray collection conditions if the analytical working distance (WD) needs to be changed, e.g. in case of large sample inspection
  • bring the detector as close as possible to the pole piece (or even past it, if permissible), which maximizes the solid angle of X-ray collection. This is particularly advantageous when analyzing samples with low X-ray yield, like organic or beam-sensitive materials.
SEM chamber with sample on the left, EBSD detector screen (lower right) with ARGUS FSE/BSE detector, EDS detector (top right) and microscope pole piece (top)

Simultaneous EBSD and EDS analysis at highest speeds with the VZ-Adapter

The VZ-Adapter is also an important aid for simultaneous EBSD and EDS analysis at high speeds. While the e-Flash EBSD detector can be brought into optimum analytical position using its built-in vertical screen shift feature,  the VZ-Adapter allows to do the same with the XFlash®  EDS detector. This greatly improves the flexibility for combined analysis, by

  • making it possible to change the working distance to accommodate samples of varying sizes or by being able to analyze very large sample areas of up to 5 x 5 mm² in a single measurement
  • optimizing the collection conditions for the XFlash®, resulting in better count statistics, which in turn allow to speed up the measurement.

The VZ-Adapter is compatible with EBSD detectors with ARGUS™ forescattered / backscattered electron detector installed and does not interefere with its operation.