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N8 TITANOS
- Complete N8 TITANOS
Air-Bearing Stage System for Ultra-High Precision Inspection
The new N8 TITANOS air-bearing stage for nanometer scale inspection of 300 mm wafers, masks and other large samples is the result of more than a decade in AFM/SPM development.
The system is designed to provide highest stability and precision in surface measuring applications. The single plane architecture with the rigid granite base provides significant advantages over multi-component metal-made translation systems. Higher strength, smaller thermal expansion and lower mass enables rapid positioning with great accuracy.
Features of the N8 TITANOS
- For samples up to 300 mm x 300 mm (larger on request)
- Sample inspection via optical microscope (or any other optical tool)
- Coordinate transfer from all other inspection devices (ASCII)
- AFM/SPM performance: rms (Z) < 0.05 nm
The images show the N8 TITANOS with the ULTRAObjective AFM/SPM and Vistec Semiconductor Systems microscope. Instead of the microscope also other inspection instruments may be integrated.
Left: Detail of the optical microscope, sample stage with 300 mm wafer and ULTRAObjective AFM/SPM scanning head
Sample translation between the different measurement devices is achieved without loss of productivity due to the high-speed, high precision positioning capability of the system.
The seamless combination of different characterization tools on one single platform makes the NANOStation® 300 the most cost effective ultra-high precision system for large samples, like wafers, masks, TFT displays, solar panels, and reticles.
Two features enhance your time to result extremely:
1) The optical sample inspection can be performed on the same platform as the AFM measurement - therefore there is no need for transferring your sample from machine to machine and/or from lab to lab.
2) The coordinate transfer can be used to investigate each imported position with the AFM.
Highest Stability and Precision
The translation stages work with a zero-friction air bearing system. This allows fast, contactless, and wearless motion on an air cushion with highest positioning accuracy. It also avoids drift issues which are immanent with systems using spindles for stage translation.
Linear encoders read the stage position directly from phase gratings on glass. This allows extremely precise stage positioning (1 micron absolute positioning accuracy over 300 mm, 100 nm repeatability can be achieved).
During AFM/SPM measurements, the granite sample stage rests firmly on the granite foundation.