Electron Blackscatter Diffraction

Simultaneous EBSD and EDS Acquisition – At Highest Possible Speed

Combined EBSD and EDS analyses
Combined EBSD and EDS analysis (see text)

Due to the flexibility in positioning both EDS and EBSD detectors, optimum measurement conditions for both can be achieved. The count rate capability of the XFlash® EDS detector enables high speed of up to 520 patterns/s for simultaneous EBSD and EDS data acquisition. EDS information is collected in a hyperspectral database in form of point spectra, the so-called HyperMap. Like the EBSD data the EDS data is stored in a lossless format. It can therefore be presented in many different ways and is available for re-analysis anytime.

The figure shows the procedure of a sample re-analysis with the help of a combined EBSD and EDS measurement. Analyzed was a joined copper-aluminum bar. As copper (Cu) and aluminum (Al) are virtually indistinguishable by EBSD alone (very similar patterns) the according analysis (upper image in the figure) leads to an indexing of almost the entire sample as Cu. Reanalysis using the EDS infomation leads to correct separation into Cu (left) and Al (right), as can be seen in the lower image of the figure.