Semiconductors

Intrinsic, SiGe and compound semiconductors are the all-important building blocks of the modern world of electronics and communication. Scientists and engineers design materials with new characteristics, develop new production processes and ensure the quality of the products. X-ray methods provide a non-destructive way to obtain a large set of physical parameters of the semiconductor materials. With a wavelength that matches the crystalline lattice spacings involved, X-rays are the natural probe for any type semiconductor sample. Absolute analysis results without calibration are possible, in contrast to traditional methods that use wavelengths of the order of a micrometer.

The hot topic for all semiconductor applications is the examination of the samples, even on large 300 mm wafers, with about 50 µm spatial resolution, either for R&D as well as under routine production control conditions. Bruker AXS offers tailor-made solutions to fit your experimental needs:

• D8 FABLINE – Fully SEMI compliant, automated
• D8 DISCOVER – R&D lab tool