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• Pitch Standard - Bruker’s certified pitch standard is primarily used for lateral calibration and magnification calibration.
• Step Height Standards - Bruker provides an 8um and 50um NIST-traceable standard for calibration and monitoring.
• Calibration Standards - A number of calibration standards are available to best match system performance to your system and application certification requirements, including NIST- and PTB-traceable 10µm and 50µm step height standards for tracking system performance and certified pitch standards for magnification and lateral calibrations. Each comes with its own serial number and a Certificate of Calibration. Available standards include 44nm, 88nm, 450nm, 940nm, and 4.5um.