Others

  • Vacuum Switch Box - This simple toggle switch box simplifies the use of the NT vacuum and wafer chucks.
  • Motorized Quadruple Turret - The motorized, programmable four-position turret uses clean and quiet stepper motor/belt drive for quick, efficient operation with minimal contamination risk.
  • 1mm Range Kit - The 1mm Range Kit increases your stylus profiler’s maximum vertical range from 512µm to 1mm. Range kit comes complete with a 900um step calibration standard to verify performance and range.
  • The Auto XY stage kit - The Auto XY stage kit provides a full 150mm access in X and Y on the system, for 3D mapping and program automation. It includes the ability to align, deskew and program over 200 sites on a single program. 3D mapping requires the Vision software package.
  • Styli Type A (0.7um green, 0.2um yellow, 2X20 white , 20X200 pink) - Bruker offers a number of different styli to best suit your stylus profiler application, including high-aspect ratio (HAR) tips for accurate deep trench measurements. Styli come complete with a certificate of certification. Diamond tip, radii stylus with SEM image verification.
  • Styli Type B (25um black, 12.5um red, 5um orange, 2.5um grey) - Bruker offers a number of different styli to best suit your stylus profiler application, including high-aspect ratio (HAR) tips for accurate deep trench measurements. Styli come complete with a certificate of certification.
  • Workstation Carts - Bruker offers a selection of ergonomically compliant carts to provide monitor and keyboard setup and working area. The DMEMS cart, recommended for the NT1100 DMEMS and NT3300 DMEMS instruments and required for CE certification, completely houses the electronics of a full system, and provides a clean workstation for note taking, and holding the recommended dual monitors for analysis and system operation.
  • Vibration Isolation System - Vibration Isolation System includes a passive air table system and an active vibration cancellation system for enhanced Z isolation and low-frequency noise isolation. Wheels provide convenient instrument positioning and adjustable feet enable instrument leveling. The air gap separating the table from its support provides excellent vibration amplitude reduction. An electronic feedback system monitors information from a geophone and outputs necessary current to a voice coil.
  • The Silicon Carbide (SiC) Reference Mirror - The SiC reference mirror provides ultra-flat, ultra-smooth reference generation for PSI mode and system noise measurements.