Objectives

  • Linnik Super-Long-Working-Distance Objectives - The super long working distance of the Linnik objective design is an important component of the NPFLEX system flexibility. These objectives are ideal for imaging deep trenches, grooves, and highly topographic surfaces. Operation of the system is made easy with the 34 millimeter working distance at parfocal plane to the tip/tilt motion of the optical metrology head. The exchange of objectives takes only seconds with the unique bayonet design.
    - The 2X SLWD provides a field of view ranging from 1.58mm x 1.19mm to 5.76mm x 4.32mm depending upon multiplier tube. Due to optical aberrations at low magnifications, this objective should be used with reference removal applied and is not recommended when investigating flat surfaces.
    - The 5X SLWD provides a field of view ranging from 0.63mm x 0.48mm to 2.30mm x 1.73mm depending upon multiplier tube.
    - The 10X SLWD provides a field of view ranging from 0.32mm x 0.24mm to 1.15mm x 0.86mm depending upon multiplier tube.
  • Parfocal, non-turret-mountable objectives - Bruker’s objectives feature excellent thermal stability and easy focusing for long-term measurement accuracy.2X LWD, 5X LWD, 10X LWD
  • Parfocal, turret-mountable objectives - Bruker’s objectives feature excellent thermal stability and easy focusing for long-term measurement accuracy. 2.5X L, 5X, 5X L, 10X, 10X BF, 20X, 50X, 100X
  • Single Objective Adapters - Bruker offers an adapter for mounting single objectives to the NT profilers, as well as a low-profile adapter for use with long working distance objectives, TTM objectives, and for situations requiring maximum sample clearance.
  • TTM objectives - Bruker’s objectives feature excellent thermal stability and easy focusing for long-term measurement accuracy. 2X TG, 5X TG, 10X TG, 20X TG
  • Non-parfocal objectives - Bruker’s objectives feature excellent thermal stability and easy focusing for long-term measurement accuracy. 1.5X L