Instrumentation for the Analysis in the Nano-World

Bruker Nano is a leading manufacturer of analytical instrumentation for analysis at highest spatial resolution.

QUANTAX EDS for SEM and S/TEM
Bruker's unique QUANTAX systems for X-ray microanalysis (EDS) on scanning electron microscopes (SEM) and (scanning) transmission electron microscopes (S/TEM) are leading in performance for all tasks in elemental analysis.

QUANTAX Electron Backscatter Diffraction (EBSD)
The QUANTAX CrystAlign EBSD system is fully integrated with the QUANTAX EDS system under a single user interface and therefore comfortable and easy to use. The e-Flash1000 EBSD detector is extremely fast and at the same time offers great flexibilty in measurement setup through the in-situ tilt option, including simultaneous EDS and EBSD measurement.

Atomic Force Microscopy (AFM) and Scanning Probe Microscopy (SPM)
Bruker’s atomic force microscopes (AFMs) drive the world’s leading-edge research in life science, materials science, semiconductor, electrochemistry, and many other applications. These instruments have brought nanoscale investigation to every scientific discipline, and the decades of experience in proprietary AFM metrology at our disposal enables us to deliver unparalleled accuracy and resolution at price points for every budget.

Micro X-ray Fluorescence Spectrometry (µ-XRF)
Micro X-ray fluorescence spectrometry (µ-XRF ) is the method of choice for elemental analysis with X-ray excitation and high spatial resolution. What distinguishes µ-XRF from standard X-ray fluorescence spectrometry is that the tube-generated X-ray beam is either collimated or focused to spot sizes ranging from 25 to 2,000 µm.

Optical Surface Profilometry
Based on ten generations of proprietary technology advances, Bruker’s white light interferometric profilers feature patented, higher brightness dual-LED illumination that, when combined with the systems’ superior vertical resolution, provide the high sensitivity and stability necessary for precision, non-contact 3D surface metrology in applications and environments that are challenging for other metrology systems.

Stylus Surface Profilometry
Bruker’s stylus profilers are the culmination of four decades of proprietary stylus profiler technology. These surface profilers provide repeatable, accurate measurements on varied surfaces, from traditional 2D roughness surface characterization and step height measurements to advanced 3D mapping and film stress analyses.