TITANOS Specifications

Lowest noise floor down to the sub-nanometer level
Single plane design with air-bearing for high velocity movements
High position accuracy and repeatability
Coordinate transfer and macro programming
Modular design for the combination of AFM/SPM with additional inspection techniques, e.g. optical microscopy, phase-shift interferometry, confocal microscopy etc.
Easily accessible for various types of wafer robots and mask handling systems
Designed for optimal air flow and heat removal, low thermal drift
Customized sample holders (e.g. wafer chuck)

AFM/SPM Specifications


Scan Range	20 µm x 20 µm x 3 µm, 40 µm x 40 µm x 4 µm, 80 µm x 80 µm x 5 µm, 200 µm x 200 µm x 8 µm (16 µm)
SPM modes	all modes applicable, refer to AFM Techniques
RMS	0.05 nm (Z)


Motor	electromagnetic, contactless linear motor
Optical encoder	accuracy class 1 µm (Heidenhain LIP581)
Travel range, x-y	550 mm x 300 mm
Stage resolution	50 nm
Absolute accuracy	± 1 µm
Stage repeatability	up to 100 nm
Vertical stability	<0.05 nm
Maximum velocity	500 mm/s
Dimensions (LxWxH)	1620 mm x 990 mm x 1530 mm
Weight	ca. 2000 kg