TITANOS Applications

Slightly misaligned oxidized Si 111 wafer:

The ultra-high stability is demonstrated by a clear picture of smallest surface detail. The terraces with a step height of 0.3 nm are detected without filtering.

Image size is 5 µm x 5 µm, Z-height is 2 nm.

Defect on Si-wafer

Image size is 12 µm x 12 µm,

Z-height is 600 nm

Topography of structured Si wafer.

Image size is 38 µm x 38 µm,

Z-height is 3000 nm

Optical image of TFT display, DIC contrast

AFM measurement on TFT display.

Image size is 200 µm x 150 µm

Z-height is 3000 nm