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- Bruker Introduces Novel TERS-Ready AFM System
- Bruker Completes Acquisition of Center for Tribology, Inc.
- Bruker Announces Agreement to Acquire CETR
- Bruker Introduces Dimension Edge PSS Atomic Force Microscope for Advanced HB-LED Production Metrology
- Bruker Announces New Website and Online Store for AFM Probes
Upcoming Events
- Pittcon 2012
Mar 11-15, Orlando, Florida, USA - SEMICON China 2012
Mar 20-22, Shanghai, China - ARAB LAB 2012
Mar 26-29, Dubai, UAE - DPG Spring Meeting
Mar 27-29, Berlin, Germany - 2012 NUANCE-Bruker International Symposium
Apr 05, Evanston, IL, USA - ANALYTICA 2012
Apr 17-20, Munich, Germany
TITANOS – 300 mm AFM for Ultra-High Precision Inspection
Now demonstrating atomic resolution
- TITANOS
The TITANOS air-bearing stage for nanometer scale inspection of 300 mm wafers, masks and other large samples is the result of more than a decade in AFM/SPM development.
The system is designed to provide highest stability and precision in surface measuring applications. The single plane architecture with the rigid granite base provides significant advantages over multi-component metal-made translation systems. Higher strength, smaller thermal expansion and lower mass enables rapid positioning with great accuracy.
TITANOS Features
- For samples up to 300 mm x 300 mm (larger on request)
- Sample inspection via optical microscope (or any other optical tool)
- Coordinate transfer from all other inspection devices (ASCII)
- AFM/SPM performance: rms (Z) < 0.05 nm
- Close up of the TITANOS
The TITANOS with the NANOS AFM/SPM is additionally equipped with a dedicated semiconductor inspection microscope. Instead of the optical microscope also other inspection instruments may be integrated.
Right picture: Detail of the optical microscope, sample stage with 300 mm wafer and NANOS AFM/SPM scanning head.
Atomic Resolution Demonstrated
- Image of HOPG obtained with TITANOS
Atomic resolution images of HOPG (highly oriented pyrolythic graphite), right, demonstrate the superior stability of the TITANOS system. This remarkable step towards ultimate resolution could only be achieved by combining optimized positioning methods, a revolutionary layout and Bruker's longstanding interferometric AFM detection experience.
The seamless integration of different characterization tools on one single platform makes the TITANOS the most cost effective ultra-high precision system for large samples, like wafers, masks, TFT displays, solar panels, and reticles.
