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Layer thickness and chemical composition of multilayer samples can be easily determined with X-ray fluorescence analysis (XRF). The layered samples are analyzed directly either on the wavelength dispersive X-ray fluorescence spectrometers (WDXRF) S4 PIONEER or S8 TIGER.

ML^plus is extending SPECTRA^plus for the analysis of single layer and multilayer samples with wavelength dispersive X-ray fluorescence analysis (WDXRF). It allows the direct determination of thickness and composition of layers samples down to several atomic layers (less than 1nm) and up to the µm or even mm-range.

ML^plus is using a full fundamental parameter approach for all calculations. The determination of thickness and composition in ML^plus is based on the standardless calibration of SPECTRA^plus, i.e. no specific multilayer standards are required. Nevertheless any available multilayer standard can be used to optimize the results.

ML^plus can be used for automatic evaluation after each single measurement once a model has been setup. This makes multilayer analysis available for routine process control e.g. in production of layered glass or coated steel.