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MEMS — Micro-Electro Mechanical Systems
Unsurpassed Static & Dynamic MEMS Metrology
Since the earliest micro-sensors and accelerometers, optical profiling has been an enabling technology for Micro-Electro Mechanical Systems (MEMS) development and manufacturing. These techniques continue to be adapted and expanded to meet the unique challenges of MEMS metrology. The combination of speed, non-contact, and large field of view makes the optical profiler and 3D microscope ideal metrology tools for a vast majority of MEMS. With a change of the objective lens, the field of view of a single image can be adjusted from a few micrometers up to 6mm x 8mm. The field of view can also be substantially increased by the stitching of individual images. Several levels of automation are available to fit the needs of a production fab, or an R&D lab.
The development of dynamic optical profiling lets MEMS researchers visualize and quantify periodic MEMS motion. This dynamic profiling can also characterize transient behavior, such as thermal cycling, settling time and switching time. Packaged MEMS devices can now be accurately characterized through their transparent packaging, for the most accurate analysis of actual device performance. The combination of static and dynamic measurement helps researchers take ideas quickly through development to full production, with verifiable performance and reproducibility.
Stylus Profiler Solution For MEMS
The DektakXT Stylus Surface Profiling System features enhanced micro-electro mechanical systems application performance including large-step MEMS characterization.
• DektakXT Stylus Surface Profiling System
3D Microscopes For MEMS
The ContourGT Family of 3D Microscopes provide the power of a 64-bit, multi-core processor with Vision64™ software for accelerated three-dimensional surface measurement and analyses.
Micro-Electro Mechanical Systems Application Notes
Download our free PDF application notes relating to MEMS mterology.
• 3D Micro-Electro Mechanical Systems MEMS Metrology with Optical Profilers (1.8 MB)
• MEMS in-Motion A New Method for Dynamic MEMS Metrology (2.1 MB)
• Characterizing MEMS Devices Through Transparent Media (1.5 MB)
