Solutions for Semiconductors

LAB Tools

D8 DISCOVER
D8 DISCOVER

Various X-ray methods are available for obtaining crucial parameters in the nanodomain. One can think of thickness, density, roughness, chemical composition and orientation of thin layers, lattice constants and mismatches, strain and relaxation of epitaxial films and porosity and crystallite sizes in thin films.

The D8 DISCOVER offers optimized solutions for the analysis of the smallest features using X-ray reflectivity (XRR), high resolution X-ray diffraction (HRXRD), micro diffraction (µXRD), grazing incidence diffraction (GID), grazing incidence small angle X-ray scattering (GISAXS) and micro X-ray fluorescence (µXRF).