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- Bruker Hosts 10th Annual International Nanoscience Conference
- Bruker Introduces Novel TERS-Ready AFM System
- Bruker Completes Acquisition of Center for Tribology, Inc.
- Bruker Announces Agreement to Acquire CETR
- Bruker Introduces Dimension Edge PSS Atomic Force Microscope for Advanced HB-LED Production Metrology
Upcoming Events
- OrthoTec 2012
Jun 06-07, Winona Lake, IN, USA - ACHEMA 2012
Jun 18-22, Frankfurt/M., Germany - Seeing at the Nanoscale 2012
Jul 09-11, Bristol, UK - ACA Annual Meeting
Jul 28-Aug 01, Boston, Massachusettes, USA - ACS Fall
Aug 19-21, Philadelphia, Pennsylvania, USA
InSight 3D Atomic Force Microscope
- InSight 3D Atomic Force Microscope
Production-based 3D reference metrology for 45 nm and below
For unparalleled accuracy and precision – the kind needed for non-destructive, high-resolution 3D measurements of critical 45nm and 32nm semiconductor features -- the InSight™ 3D Atomic Force Microscope (AFM) is the clear choice.
InSight 3DAFM provides the accuracy needed to improve process control through critical dimension (CD) and sidewall angle (SWA) metrology.
Plus, InSight 3DAFM gives you three times the throughput and twice the measurement accuracy and precision versus previous AFMs.
Features
- Provides reference metrology for crucial CD elements like gate, shallow trench isolation (STI) union dual-damascene structures, sidewall angles, line-edge variation and more.
- Provides the lowest measurement uncertainty for critical dimension (CD) and sidewall angle (SWA) metrology
- 30 wph, 9 sites throughput for Depth metrology & 12 wph, 9 sites throughput for CD metrology Unique, non-destructive, 3D Metrology (LER, LWR, SWA)
- Production level reliability and state-of-the-art automation for inline productivity
More Information
InSight 3D Automated Atomic Force Microscope (PDF brochure)
Bruker´s Support Programs – Nano Surfaces Business (PDF brochure)
