X-ray Metrology

FAB Tools FEOL

For Front End of the Line (FEOL) applications, Bruker AXS offers the following products. The modularity of the tools ensures having the optimized configuration according to your needs.

  • D8 FABLINE R
  • D8 FABLINE H
  • D8 FABLINE MH
  • D8 FABLINE RMF

  • Front-end Applications