Electron Blackscatter Diffraction

e–Flash HR EBSD Detector

e-Flash EBSD Detector
e-Flash HR+ EBSD Detector

The eFlashHR offers both high resolution and sensitivity. With a resolution of almost 2 Megapixels (1600 x 1200 pixels) it can display finest pattern details. At the same time it offers highest sensitivity. Excellent camera optics warrant minimum pattern distortion. These properties make the eFlashHR the tool of choice to tackle difficult tasks in EBSD analysis.

The list of suitable applications includes:

  • low beam current operation
  • low kV operation
  • poorly conducting samples
  • nanomaterials
  • analysis of pseudosymmetries
  • lattice strain investigation

Maximum flexibility in data acquisition

The eFlashHR offers maximum flexibility in pattern acquisition. The vertical shift option of the fluorescent screen, provided through the in-situ tilting mechanism,
supports the analysis of comparatively large and very small samples at various working distances, even during microscope operation. The eFlashHR features a motorized high precision drive which can be software controlled or manually operated by using a touch panel on the side of the detector encasement. The detector travel of 250 mm permits installation on SEM chambers of all sizes.

Safe to operate

Detector motion monitoring is integrated in a multi-level safety architecture. First of all, a LED indicator shows the current screen position, even if the detector is off. Should for any reason the screen come into contact with the sample or the stage an integrated touch sensor triggers immediate retraction of the detector, so that severe damage is avoided. Screens can be exchanged easily by the user. All required electronics and controls for camera, signal processing and even for the ARGUS™ BSE/FSE detectors are contained in the detector encasement. There are no moving parts or external control units posing safety risks.

The detector head of the eFlashHR is slim and chamfered to enable small working and detector-to-sample distances, as well as simultaneous operation with an XFlash® EDS detector.

ARGUS™ FSE/BSE detectors optionally available

eFlashHR is now optionally available with a set of forescattered electron (FSE) and backscattered electron (BSE) detectors (ARGUS™) – eFlashHR+. This further increases the versatility of the detector and provides valuable additional information for meaningful and efficient EBSD analysis.

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