Language
Search
News
- Bruker Hosts 10th Annual International Nanoscience Conference
- Bruker Introduces Novel TERS-Ready AFM System
- Bruker Completes Acquisition of Center for Tribology, Inc.
- Bruker Announces Agreement to Acquire CETR
- Bruker Introduces Dimension Edge PSS Atomic Force Microscope for Advanced HB-LED Production Metrology
Upcoming Events
- OrthoTec 2012
Jun 06-07, Winona Lake, IN, USA - ACHEMA 2012
Jun 18-22, Frankfurt/M., Germany - Seeing at the Nanoscale 2012
Jul 09-11, Bristol, UK - ACA Annual Meeting
Jul 28-Aug 01, Boston, Massachusettes, USA - ACS Fall
Aug 19-21, Philadelphia, Pennsylvania, USA
Dimension Automated Atomic Force Profiler
- Dimension Automated Atomic Force Profiler
For chemical mechanical planarization and etch metrology at 65nm
Get the highest performance device characterization and etch depth metrology available with the Dimension Atomic Force Profiler.
It is the world's only AFM single-tool fab solution designed for chemical mechanical planarization and etch metrology at 65 nm.
Features
- Combines the outstanding resolution of an atomic force microscope with the long-scan capability of an atomic force profiler
- Delivers the fastest throughput of any AFM or profiler
- Unsurpassed repeatability for in-line STI, W, Cu and CMP metrology
- Replaces costly, destructive cross-sectioning techniques, reducing etch measurement turnaround from days to minutes
- Exclusive TappingMode™ operation enables nondestructive measurement of high-aspect-ratio features
