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Dimension Edge PSS Atomic Force Microscope with AutoMET Metrology Analysis Software

Patterned Sapphire Substrate Resolution For Now And The Future

Dimension Edge PSS with AutoMET software and 9 wafer chuck

Bruker's Dimension Edge™ PSS Atomic Force Microscope with AutoMET™ Metrology Analysis Software is the ideal nano-metrology and nano-inspection system for LED substrate and epitaxial manufacturers. As an extension of the Dimension Edge AFM platform, the Edge PSS (Patterned Sapphire Substrate) incorporates the incredible value and resolution for which the Dimension AFM systems are renowned, while also providing a specialized solution for substrate measurements. The system incorporates Bruker's proprietary AutoMET metrology analysis software, which has been designed specifically to meet the needs of patterned sapphire substrate suppliers, providing a level of automation and ease of use never before seen in a value-price atomic force microscope.

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Dimension Edge PSS AFM Delivers Advanced Automated Metrology & Production Capabilities, Featuring

• Sub-micron pitch resolution meets roadmap needs
• <0.2nm noise floor provides bare substrate and epi roughness measurements
• Sample flexibility accommodates 2- to 6-inch wafers
• Full analysis software measures every feature or statistical data automatically
• PSS analysis characterizes height, side-wall angle, profile, diameter, and pitch
• AutoMET metrology analysis software automates multi-wafer runs

Brochure and Datasheet

Dimension Edge PSS AFM with AutoMET metrology analysis software (PDF Datasheet)

Dimension Edge AFM Platform without PSS extension (PDF Brochure)

Publications

Precision Tools Support Critical PSS Metrology from R&D through High-Volume LED Fabrication (Sep. 2011 – LEDs Magazine)

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Community, Learning Resource & Social

Share your data images and videos (Community Media - NanoTheater), discuss the benefits of the Dimension Edge PSS AFM with AutoMET software with the people that built it (Forums - SPM Digest), and learn more about the ideal metrology and inspection atomic force microscope for LED substrate and epi manufacturers on our NanoScale World Open Community

Modes & Techniques

Conductive Atomic Force Microscopy (C-AFM) Contact Mode Electric Force Microscopy (EFM) Force-Distance Measurements Force Modulation Microscopy Force Volume Lateral Force Microscopy (LFM) Magnetic Force Microscopy (MFM) Nano-Indentation

PhaseImaging™ Scanning Capacitance Microscopy (SCM) Scanning Thermal Microscopy Scanning Tunneling Microscopy (STM) Surface Potential TappingMode™ Thermal Analysis (VITA) Tunneling Atomic Force Microscopy (TUNA)