Stylus Profilers

ContourGT-X8 PSS Non-Contact 3D Optical Profiler

ContourGT-X8 PSS Non-Contact 3D Optical Profiler
ContourGT-X8 PSS Non-Contact 3D Optical Profiler

High-Throughput, Precision Surface Metrology for HB-LED PSS Production

The ContourGT-X8 PSS provides highly repeatable, high-throughput, precision surface metrology of high-brightness light-emitting diode (HB-LED) patterned sapphire substrates (PSS). Based on the flagship ContourGT™ X8, this special configuration combines advanced non-contact 3D measurement capabilities with unique Bruker PSS metrology hardware and software, and a Wafer Automation System Developer's Kit (SDK) that provide a tailored solution for PSS quality assurance and quality control applications.

Feature Set Tailored for Automated HB-LED PSS Metrology

  • Simultaneous measurement of height, width, and pitch of multiple PSS features
  • Fast and easy multi-region automation, pass-fail, reporting and databasing
  • Optimized, easy integration with automated substrate handlers
  • Unmatched vibration immunity with excellent gauge repeatability and reproducibility

Unmatched Measurement Capabilities with Highest Vertical Resolution over Industry's Largest Field of View

  • Unique, thermally stabilized 115X objective with 2X magnifier provides 230X magnification
  • Sub-angstrom-to-millimeter vertical range delivers unparalleled measurement flexibility

Unique Metrology Hardware for Enhanced Reliability and Repeatability in Production Environments

  • Patented dual-source illumination with high-brightness LEDs provides superior measurement quality
  • Patented automatic self-calibration capability ensures tool-to-tool correlation, measurement accuracy, and long term system stability

64-bit, Multi-Core Compute Platform with Vision64 Software for Accelerated Surface Measurement and Analyses

  • Parallel processing using multi-core optimization and other techniques provides up to 10X higher throughput on critical metrology analyses
  • Unmatched stitching capability seamlessly synthesizes thousands of individual datasets into one contiguous image

Highly Intuitive User Interface with Best-in-Class Ease of Use, Automation, and Analysis

  • Streamlined user interface simplifies measurement and data acquisition to increase system and personnel efficiency
  • Unique visual workflow tools provide intuitive access to an extensive library of filters and analysis options