ContourGT InMotion 3D Optical Microscope

ContourGT InMotion 3D Optical Microscope

The ContourGT InMotion 3D Optical Microscope provides the most reliable and detailed surface characterization of dynamic MEMS and other micro-devices in operation. Utilizing white light interferometry, the ContourGT InMotion performs three-dimensional surface measurements of features from 0.1nm to 10mm in height for devices as they actuate. The system integrates a proprietary stroboscopic technology and powerful data acquisition and Vision analysis software to deliver simultaneous static and dynamic device measurements for frequencies from 11Hz to 2.4MHz on a single system.

With ContourGT InMotion researchers and manufacturers can characterize resonant frequency, measure shape distortion and, deflection, surface roughness, step heights and critical dimensions on wide variety of topographic features for detailed failure analyses for improving device quality control and yield.

Features:

• Fast, non-contact and accurate static and dynamic 3D characterization of micro-devices.
• Wide range of operation frequencies from 11Hz to 2.4MHz with complete behavioral analyses over the full motion cycle.
• Sub-nanometer vertical resolution.
• Accurate measurement of features from 0.1nm to 10mm in height in dynamic and static mode.
• Frequency, amplitude and phase response characterization.
• Powerful Vision software for accelerated 3D surface measurement analyses