Challenges in Nanoanalysis

Performing EDS Analyses on Small Structures at Low Acceleration Voltages

Continuing technological advances require the elemental analysis of increasingly smaller structures in many industrial fields, including biological applications, semiconductors, and nanotechnology in general.

This confronts the otherwise well proven electron microscope based energy dispersive spectroscopy with new challenges. Most of these challenges are due to physical conditions, such as limited resolution and radiation yield in the low energy range.

During the last few years Bruker AXS Microanalysis has been researching solutions for these problems, and during this webinar we showed you how the recent improvements in technology provide the answers. In particular, developments in the QUANTAX EDS for SEM system and the new 5th generation XFlash^® detectors are important factors in pushing this area of science ahead.