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AcuityXR Enhanced-Resolution Optical Microscopy Technology

Winner of the R&D 100 Award for Technical Excellence

AcuityXR™ is a revolutionary new optical surface profiler measurement capability that combines unique, patent-pending, Bruker hardware and software technology that enables select ContourGT™ 3D Optical Microscopes to break the optical diffraction limit and deliver lateral resolutions previously considered impossible to achieve with conventional optical microscopy techniques.

See related application notes, brochures, and datasheets, watch videos, and visit important AcuityXR-related links.

Request a personal demonstration of the AcuityXR using your samples, or speak with an expert about your metrology needs.

AcuityXR Recognized for Technical Excellence

"Bruker is pleased to have again been recognized by the R&D 100 award committee," said Mark R. Munch, Ph.D., President of the Bruker Nano Surfaces Division. "Prior to this year, metrology instrumentation developed at our facilities has earned seven additional R&D 100 Awards, including four for optical metrology and three for atomic force microscopy. We are gratified that with AcuityXR we can provide our customers with previously unattainable optical metrology performance, and look very much forward to the innovations they will accomplish with these new capabilities."

See the complete list of 2011 R&D 100 Award Winners

How AcuityXR Works

Bruker ContourGT 3D Optical Microscopes with AcuityXR and equipped with enhanced Phase Shifting Interferometry (PSI) and patented High-Definition Vertical Scanning Interferometry (HDVSI) measurement modes can resolve features of 130 nanometers in width, unprecedented in optical microscopy and nearly three times better than systems not equipped with the technology. Furthermore, AcuityXR enables enhanced lateral resolution without reducing the field-of-view that would accompany equivalent magnifications achieved through conventional means. With AcuityXR, ContourGT systems can measure and resolve sample areas of interest under extreme magnification with zero or reduced "stitched" fields-of-view to provide substantially improved ease-of-use. AcuityXR also improves dimensional repeatability on narrow structures by factors of up to 5x, providing a true metrology benefit in addition to its ability to reveal exceptionally fine features.

AcuityXR provides improved sharpness, clarity and definition of scratches, defects, and reveals surface textures with greater detail. Furthermore, the higher pixel density from AcuityXR allows the resolution of nanometer-level features that to now have been impossible to resolve with conventional confocal or interferometric microscopy techniques.

AcuityXR is an optional capability that is available on the ContourGT-K1, ContourGT-X3, and ContourGT-X8 3D Optical Microscopes.

What AcuityXR Provides

• Up to 3X improvement in lateral resolution while maintaining equivalent field-of-view (FOV) of lesser magnification
• Visibility of nanoscale features, lines and spaces at or below 130nm that were previously impossible with conventional interferometric or confocal microscopy techniques
• Wider FOV and higher pixel density of equivalent magnifications obtained with conventional means
• Up to 5X improvement in dimensional repeatability on nanoscale structures
• Ideal solution for smooth or smooth/stepped surfaces