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LEPTOS R is designed for the analysis of X-Ray Reflectivity data and off-specular Diffuse Scattering (DS) from thin layered structures. The module is fully integrated in LEPTOS suit and can be used for simultaneous analysis of HRXRD, GISAXS and XRR data. As a part of the LEPTOS suit, R module inherits all the functionality common for the whole package. The module provides:

• Powerful and flexible sample model editor including the tools for the superlattices, linking of layer physical parameters, user-defined layer profiles
• The diversity of the interfacial roughness models for the samples with different growth morphology
• Simulation and fitting of the off-specular diffuse X-ray scattering by several vertical and lateral roughness correlation models; both specular and off-specular data can be fitted consistently
• Patented Method of EigenWaves (MEW) for the essential acceleration of the fits for the superlattices and repeating multilayers
• Fast Fourier Transform for quick estimation of the thicknesses
• The choice of the Genetic Algorithm, Simulated Annealing, Simplex or Levenberg-Marquardt fitting routines depending on the strategy of the data interpretation

The module LEPTOS R has been highly rated in several international benchmarks including VAMAS project A10. The newly developed international rfCIF standard for the data format of XRR data fits well the structure of LEPTOS R due to participation of Bruker representative in establishing of this standard.